Invention Grant
- Patent Title: Photosensitive composition and photoresist
- Patent Title (中): 感光组合物和光致抗蚀剂
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Application No.: US13741450Application Date: 2013-01-15
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Publication No.: US09081275B2Publication Date: 2015-07-14
- Inventor: Hsien-Kuang Lin , Jauder Jeng , Sue-May Chen , Te-Yi Chang , Tsung-Yi Chou
- Applicant: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Applicant Address: TW Hsinchu
- Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee: INDUSTRIAL TECHNOLOGY RESEARCH INSTITUTE
- Current Assignee Address: TW Hsinchu
- Agency: McClure, Qualey & Rodack, LLP
- Priority: TW99141978A 20101202
- Main IPC: G03F7/004
- IPC: G03F7/004 ; G03F7/028 ; G03F7/032 ; G03F7/033

Abstract:
A photosensitive composition and a photoresist are provided. The photoresist is formed by compounding a photosensitive composition. The photosensitive composition comprises a binder agent, a photomonomer and a photoinitiator. The binder agent has a chemical structure comprising following repeating unit: R1 is H or CH3, n is 2-40 of integer. The photomonomer has an amount of about 25-95 parts by weight relative to 100 parts by weight of a solid content of the binder agent. The photo initiator has an amount of about 0.5-15 parts by weight relative to 100 parts by weight of the solid content of the binder agent.
Public/Granted literature
- US20130137042A1 PHOTOSENSITIVE COMPOSITION AND PHOTORESIST Public/Granted day:2013-05-30
Information query
IPC分类: