PHOTOSENSITIVE COMPOSITION AND PHOTORESIST
    2.
    发明申请
    PHOTOSENSITIVE COMPOSITION AND PHOTORESIST 有权
    光敏组合物和光电子

    公开(公告)号:US20130137042A1

    公开(公告)日:2013-05-30

    申请号:US13741450

    申请日:2013-01-15

    CPC classification number: G03F7/004 G03F7/028 G03F7/032 G03F7/033

    Abstract: A photosensitive composition and a photoresist are provided. The photoresist is formed by compounding a photosensitive composition. The photosensitive composition comprises a binder agent, a photomonomer and a photoinitiator. The binder agent has a chemical structure comprising following repeating unit: R1 is H or CH3, n is 2-40 of integer. The photomonomer has an amount of about 25-95 parts by weight relative to 100 parts by weight of a solid content of the binder agent. The photo initiator has an amount of about 0.5-15 parts by weight relative to 100 parts by weight of the solide content of the binder agent.

    Abstract translation: 提供感光组合物和光致抗蚀剂。 光致抗蚀剂通过配合感光组合物形成。 光敏组合物包含粘合剂,光单体和光引发剂。 粘合剂具有包含以下重复单元的化学结构:R 1为H或CH 3,n为整数2-40。 相对于100重量份的粘合剂的固体含量,所述光单体具有约25-95重量份的量。 光引发剂相对于100重量份粘合剂的固化剂含量为约0.5-15重量份。

    Photosensitive composition and photoresist
    3.
    发明授权
    Photosensitive composition and photoresist 有权
    感光组合物和光致抗蚀剂

    公开(公告)号:US09081275B2

    公开(公告)日:2015-07-14

    申请号:US13741450

    申请日:2013-01-15

    CPC classification number: G03F7/004 G03F7/028 G03F7/032 G03F7/033

    Abstract: A photosensitive composition and a photoresist are provided. The photoresist is formed by compounding a photosensitive composition. The photosensitive composition comprises a binder agent, a photomonomer and a photoinitiator. The binder agent has a chemical structure comprising following repeating unit: R1 is H or CH3, n is 2-40 of integer. The photomonomer has an amount of about 25-95 parts by weight relative to 100 parts by weight of a solid content of the binder agent. The photo initiator has an amount of about 0.5-15 parts by weight relative to 100 parts by weight of the solid content of the binder agent.

    Abstract translation: 提供感光组合物和光致抗蚀剂。 光致抗蚀剂通过配合感光组合物形成。 光敏组合物包含粘合剂,光单体和光引发剂。 粘合剂具有包含以下重复单元的化学结构:R 1为H或CH 3,n为整数2-40。 相对于100重量份的粘合剂的固体含量,所述光单体具有约25-95重量份的量。 光引发剂相对于100重量份粘合剂的固体含量为约0.5-15重量份。

    Photosensitive composition and photoresist
    5.
    发明授权
    Photosensitive composition and photoresist 有权
    感光组合物和光致抗蚀剂

    公开(公告)号:US09170490B2

    公开(公告)日:2015-10-27

    申请号:US14141091

    申请日:2013-12-26

    CPC classification number: G03F7/033 C08L33/00 G03F7/027 G03F7/031

    Abstract: A photosensitive composition and a photoresist are provided. The photoresist is formed by compounding a photosensitive composition. The photosensitive composition includes a binder agent, a first photomonomer, and a photo initiator. The first photomonomer has at least a lactic oligomer and at least two unsaturated acrylic functional groups, wherein the first photomonomer has an amount of about 25-95 parts by weight relative to 100 parts by weight of a solid content of the binder agent. The photoinitiator has an amount of about 0.5-15 parts by weight relative to 100 parts by weight of the solid content of the binder agent.

    Abstract translation: 提供感光组合物和光致抗蚀剂。 光致抗蚀剂通过配合感光组合物形成。 光敏组合物包括粘合剂,第一光单体和光引发剂。 第一单体单体具有至少一种乳酸低聚物和至少两种不饱和丙烯酸官能团,其中第一单体单体相对于100重量份固体含量的粘合剂为约25-95重量份。 相对于100重量份的粘合剂的固体含量,光引发剂的量为约0.5-15重量份。

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