Invention Grant
- Patent Title: Liquid processing apparatus having switchable nozzles
- Patent Title (中): 具有切换喷嘴的液体处理装置
-
Application No.: US13779969Application Date: 2013-02-28
-
Publication No.: US09108228B2Publication Date: 2015-08-18
- Inventor: Takahisa Otsuka , Hirotaka Maruyama , Nobuhiro Ogata , Kazuyuki Kudo
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2012-048127 20120305
- Main IPC: H01L21/00
- IPC: H01L21/00 ; B08B3/04 ; H01L21/67

Abstract:
Provided is a liquid processing apparatus that selectively supplies processing liquids with a switching operation to the surface of a substrate to perform a liquid processing. The liquid processing apparatus includes a first processing liquid supply unit including a first nozzle block that selectively supplies an acidic chemical liquid and a rinse liquid, and a second processing liquid supply unit including a second nozzle block that selectively supplies an alkaline chemical liquid and a rinse liquid. When a chemical liquid is supplied to the substrate from one of the first and second nozzle blocks, the other of the first and second nozzle blocks is retreated to a retreat position. When the rinse liquid is supplied to the substrate from one of the first and second nozzle blocks, the other of the first and second nozzle blocks is moved to a processing position.
Public/Granted literature
Information query
IPC分类: