发明授权
US09111967B2 Liquid processing method, liquid processing apparatus and storage medium
有权
液体处理方法，液体处理装置和储存介质
- 专利标题： Liquid processing method, liquid processing apparatus and storage medium
- 专利标题（中）： 液体处理方法，液体处理装置和储存介质
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申请号： US13446255申请日： 2012-04-13
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公开(公告)号： US09111967B2公开(公告)日： 2015-08-18
- 发明人: Kenji Sekiguchi , Yasushi Fujii , Tetsuya Sakazaki
- 申请人： Kenji Sekiguchi , Yasushi Fujii , Tetsuya Sakazaki
- 申请人地址： JP Tokyo
- 专利权人： Tokyo Electron Limited
- 当前专利权人： Tokyo Electron Limited
- 当前专利权人地址： JP Tokyo
- 代理机构： Abelman, Frayne & Schwab
- 优先权： JP2011-091295 20110415; JP2011-277159 20111219
- 主分类号： B08B9/00
- IPC分类号： B08B9/00 ; H01L21/67 ; C11D7/50 ; C11D11/00 ; H01L21/02 ; H01L21/768
摘要：
Disclosed is a liquid processing method capable of rapidly penetrating a liquid chemical into a concave portion formed on the surface of a substrate with the chemical liquid. The liquid processing method includes wetting the inside of the concave portion by supplying an organic solvent having surface tension smaller than the chemical liquid to the substrate, and cleaning the inside of the concave portion with the chemical liquid by supplying a cleaning liquid including the chemical liquid to the substrate and substituting the liquid inside the concave portion with the chemical liquid.
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