Invention Grant
US09117438B2 Pre-collapsed capacitive micro-machined transducer cell with plug
有权
具有插头的预折叠电容微加工换能器单元
- Patent Title: Pre-collapsed capacitive micro-machined transducer cell with plug
- Patent Title (中): 具有插头的预折叠电容微加工换能器单元
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Application No.: US14349079Application Date: 2012-10-15
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Publication No.: US09117438B2Publication Date: 2015-08-25
- Inventor: Peter Dirksen , Ronald Dekker , Vincent Adrianus Henneken , Adriaan Leeuwestein , Bout Marcelis , John Douglas Fraser
- Applicant: KONINKLIJKE PHILIPS N.V.
- Applicant Address: NL Eindhoven
- Assignee: Koninklijke Philips N.V.
- Current Assignee: Koninklijke Philips N.V.
- Current Assignee Address: NL Eindhoven
- International Application: PCT/IB2012/055605 WO 20121015
- International Announcement: WO2013/061204 WO 20130502
- Main IPC: H04R31/00
- IPC: H04R31/00 ; G10K11/18 ; B06B1/02

Abstract:
The present invention relates to a pre-collapsed capacitive micro-machined transducer cell (10) comprising a substrate (12), and a membrane (14) disposed above a total membrane area ((Atotal), wherein a cavity (20) is formed between the membrane (14) and the substrate (12), the membrane (14) comprising a hole (15) and an edge portion (14a) surrounding the hole (15), the edge portion (14a) of the membrane (14) being collapsed to the substrate (12). The cell further comprises a plug (30) arranged in the hole (15) of the membrane (14), the plug (30) being located only in a subarea (Asub) of the total membrane area (Atotal). The present invention further relates to a method of manufacturing such pre-collapsed capacitive micro-machined transducer cell (10).
Public/Granted literature
- US20140247698A1 PRE-COLLAPSED CAPACITIVE MICRO-MACHINED TRANSDUCER CELL WITH PLUG Public/Granted day:2014-09-04
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