Invention Grant
US09120201B2 Platen and adapter assemblies for facilitating silicon electrode polishing
有权
用于促进硅电极抛光的压板和适配器组件
- Patent Title: Platen and adapter assemblies for facilitating silicon electrode polishing
- Patent Title (中): 用于促进硅电极抛光的压板和适配器组件
-
Application No.: US14021300Application Date: 2013-09-09
-
Publication No.: US09120201B2Publication Date: 2015-09-01
- Inventor: Armen Avoyan , Duane Outka , Catherine Zhou , Hong Shih
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Beyer Law Group LLP
- Main IPC: B24B41/06
- IPC: B24B41/06 ; B08B3/08 ; B08B3/12 ; C11D7/08 ; C11D7/26 ; C11D11/00

Abstract:
A process is provided for polishing a silicon electrode utilizing a polishing turntable and a dual function electrode platen secured to the polishing, which can comprise a plurality of electrode mounts arranged to project from an electrode engaging face of the dual function electrode platen. The electrode mounts and mount receptacles can be configured to permit non-destructive engagement and disengagement of the electrode engaging face of the electrode platen and the platen engaging face of the silicon electrode. The silicon electrode can be polished by (i) engaging the electrode engaging face of the electrode platen and the platen engaging face of the silicon electrode via the electrode mounts and mount receptacles, (ii) utilizing the polishing turntable to impart rotary, and (iii) contacting an exposed face of the silicon electrode with a polishing surface as the silicon electrode. Additional embodiments are contemplated, disclosed and claimed.
Public/Granted literature
- US20140030966A1 PLATEN AND ADAPTER ASSEMBLIES FOR FACILITATING SILICON ELECTRODE POLISHING Public/Granted day:2014-01-30
Information query