Invention Grant
- Patent Title: Apparatus and method for deposition for organic films
- Patent Title (中): 用于沉积有机膜的装置和方法
-
Application No.: US13864527Application Date: 2013-04-17
-
Publication No.: US09132447B2Publication Date: 2015-09-15
- Inventor: Stephen R. Forrest , Fan Yang , Richard Lunt
- Applicant: The Regents of the University of Michigan
- Applicant Address: US MI Ann Arbor
- Assignee: The Regents of the University of Michigan
- Current Assignee: The Regents of the University of Michigan
- Current Assignee Address: US MI Ann Arbor
- Agency: Morgan, Lewis & Bockius, LLP
- Main IPC: C23C16/00
- IPC: C23C16/00 ; B05D1/00 ; C23C14/12 ; C23C14/22 ; C23C14/24 ; H01L51/00 ; B05D7/00 ; H01L51/56
Abstract:
The invention provides apparatus and methods for organic continuum vapor deposition of organic materials on large area substrates.
Public/Granted literature
- US20130305990A1 Apparatus and Method for Deposition for Organic Films Public/Granted day:2013-11-21
Information query
IPC分类:
