发明授权
- 专利标题： Chip identification pattern and method of forming
- 专利标题（中）： 芯片识别图案和成型方法
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申请号： US13469386申请日： 2012-05-11
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公开(公告)号： US09136222B2公开(公告)日： 2015-09-15
- 发明人: Yoba Amoah , John J. Ellis-Monaghan , Roger C. Kuo , Molly J. Leitch , Zhihong Zhang
- 申请人： Yoba Amoah , John J. Ellis-Monaghan , Roger C. Kuo , Molly J. Leitch , Zhihong Zhang
- 申请人地址： KY Grand Cayman
- 专利权人： GLOBALFOUNDRIES, Inc.
- 当前专利权人： GLOBALFOUNDRIES, Inc.
- 当前专利权人地址： KY Grand Cayman
- 代理机构： Hoffman Warnick LLC
- 代理商 Michael Lestrange
- 主分类号： H01L21/312
- IPC分类号： H01L21/312 ; H01L23/544 ; H01L27/08
摘要：
Various embodiments disclosed include methods of performing a double exposure process on a level of an integrated circuit (IC) chip to form an IC chip having an embedded electrically measurable identifier. In some cases, the method includes: exposing a level of an integrated circuit (IC) chip using a first mask orientation; subsequently exposing the level of the IC chip using a second mask orientation distinct from the first mask orientation; and developing the level of the IC chip to form an electrically measurable identifier on the IC chip.
公开/授权文献
- US20130299939A1 CHIP IDENTIFICATION PATTERN AND METHOD OF FORMING 公开/授权日：2013-11-14
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