发明授权
- 专利标题： Position sensitive detection optimization
- 专利标题（中）： 位置敏感检测优化
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申请号： US13982109申请日： 2012-01-27
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公开(公告)号： US09140601B2公开(公告)日： 2015-09-22
- 发明人: Manjusha Mehendale , Michael Kotelyanskii , Priya Mukundhan , Michael Colgan , Wei Zhou
- 申请人： Manjusha Mehendale , Michael Kotelyanskii , Priya Mukundhan , Michael Colgan , Wei Zhou
- 申请人地址： US NJ Flanders
- 专利权人： Rudolph Technologies, Inc.
- 当前专利权人： Rudolph Technologies, Inc.
- 当前专利权人地址： US NJ Flanders
- 代理机构： Merchant & Gould, P.C.
- 国际申请： PCT/US2012/022911 WO 20120127
- 国际公布： WO2012/103440 WO 20120802
- 主分类号： G01N21/00
- IPC分类号： G01N21/00 ; G01J1/04 ; G01N21/55 ; G01N21/47 ; G01N21/17 ; G01N21/95
摘要：
An automatically adjustable method for use in opto-acoustic metrology or other types of metrology operations is described. The method includes modifying the operation of a metrology system that uses a PSD style sensor arrangement. The method may be used to quickly adjust the operation of a metrology system to ensure that the data obtained therefrom are of the desired quality. Further, the method is useful in searching for and optimizing data that is or can be correlated to substrate or sample features or characteristics that of interest. Apparatus and computer readable media are also described.
公开/授权文献
- US20140103188A1 POSITION SENSITIVE DETECTION OPTIMIZATION 公开/授权日：2014-04-17
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