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公开(公告)号：US09140601B2
公开(公告)日：2015-09-22
申请号：US13982109
申请日：2012-01-27
CPC分类号： G01J1/0448 , G01N21/1702 , G01N21/1717 , G01N21/47 , G01N21/55 , G01N21/636 , G01N21/9501
摘要： An automatically adjustable method for use in opto-acoustic metrology or other types of metrology operations is described. The method includes modifying the operation of a metrology system that uses a PSD style sensor arrangement. The method may be used to quickly adjust the operation of a metrology system to ensure that the data obtained therefrom are of the desired quality. Further, the method is useful in searching for and optimizing data that is or can be correlated to substrate or sample features or characteristics that of interest. Apparatus and computer readable media are also described.
摘要翻译： 描述了一种用于光声测量或其他类型计量操作的自动调节方法。 该方法包括修改使用PSD风格传感器装置的计量系统的操作。 该方法可以用于快速调整计量系统的操作，以确保从其获得的数据具有期望的质量。 此外，该方法可用于搜索和优化与底物或样品特征或感兴趣的特征相关或可以相关的数据。 还描述了装置和计算机可读介质。
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公开(公告)号：US20160043008A1
公开(公告)日：2016-02-11
申请号：US14776953
申请日：2014-02-05
CPC分类号： H01L22/20 , G01N21/00 , G01N21/1702 , G01N21/41 , G01N21/9501 , G01N29/04 , G01N29/2418 , G01N2021/8461 , G01N2201/06113 , G01N2291/011 , G01N2291/028 , G01N2291/0423 , G01N2291/0426 , H01L21/0231 , H01L21/78 , H01L22/00 , H01L22/10 , H01L22/12
摘要： A system and method for identifying one or more characteristics of a structure formed into a substrate is herein disclosed. Surface and bulk acoustic waves are induced in the substrate and travel past a structure of interest where the acoustic waves are sensed. Information concerning one or more characteristics of the structure is encoded in the wave. The encoded information is assessed to determine the characteristic of interest.
摘要翻译： 本文公开了一种用于识别形成衬底的结构的一个或多个特性的系统和方法。 表面和体声波在衬底中被感应并且经过感兴趣的结构并且传播到其中感测声波的结构。 关于结构的一个或多个特征的信息被编码在波中。 评估编码信息以确定感兴趣的特征。
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公开(公告)号：US20140103188A1
公开(公告)日：2014-04-17
申请号：US13982109
申请日：2012-01-27
CPC分类号： G01J1/0448 , G01N21/1702 , G01N21/1717 , G01N21/47 , G01N21/55 , G01N21/636 , G01N21/9501
摘要： An automatically adjustable method for use in opto-acoustic metrology or other types of metrology operations is described. The method includes modifying the operation of a metrology system that uses a PSD style sensor arrangement. The method may be used to quickly adjust the operation of a metrology system to ensure that the data obtained therefrom are of the desired quality. Further, the method is useful in searching for and optimizing data that is or can be correlated to substrate or sample features or characteristics that of interest. Apparatus and computer readable media are also described.
摘要翻译： 描述了一种用于光声测量或其他类型计量操作的自动调节方法。 该方法包括修改使用PSD风格传感器装置的计量系统的操作。 该方法可以用于快速调整计量系统的操作，以确保从其获得的数据具有期望的质量。 此外，该方法可用于搜索和优化与底物或样品特征或感兴趣的特征相关或可以相关的数据。 还描述了装置和计算机可读介质。
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4.发明授权Characterization with picosecond ultrasonics of metal portions of samples potentially subject to erosion 有权用可能受到侵蚀的样品的金属部分的皮秒超声波进行表征公开(公告)号：US08312772B2
公开(公告)日：2012-11-20
申请号：US12449837
申请日：2008-02-28
申请人： Guray Tas , Sean P. Leary , Dario Alliata , Jana Clerico , Priya Mukundhan , Zhongning Dai
发明人： Guray Tas , Sean P. Leary , Dario Alliata , Jana Clerico , Priya Mukundhan , Zhongning Dai
CPC分类号： G01N21/1717 , G01N21/95684 , G01N29/2418 , G01N2021/1725 , G01N2021/8416 , G01N2021/95638
摘要： A method for evaluating a manufacturing process is described. The method includes generating an optical pump beam pulse and directing the optical pump beam pulse to a surface of a sample. A probe pulse is generated and directed the probe pulse to the surface of the sample. A probe pulse response signal is detected. A change in the probe pulse varying in response to the acoustic signal forms the probe pulse response signal. An evaluation of one or more manufacturing process steps used to create the sample is made based upon the probe pulse response signal. Additionally the method may be used for process control of a CMP process. Apparatus are also described.
摘要翻译： 对制造工序的评价方法进行说明。 该方法包括产生光泵浦波束脉冲并将光泵浦波束脉冲引导到样品的表面。 产生探针脉冲并将探针脉冲引导到样品的表面。 探测脉冲响应信号。 响应于声信号变化的探针脉冲的变化形成探针脉冲响应信号。 基于探针脉冲响应信号进行用于产生样品的一个或多个制造工艺步骤的评估。 另外，该方法可以用于CMP过程的过程控制。 还描述了装置。
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公开(公告)号：US09991176B2
公开(公告)日：2018-06-05
申请号：US15515126
申请日：2015-09-29
申请人： Manjusha Mehendale , Michael Kotelyanskii , Todd W. Murray , Robin Mair , Priya Mukundhan , Jacob D. Dove , Xueping Ru , Jonathan Cohen , Timothy Kryman
发明人： Manjusha Mehendale , Michael Kotelyanskii , Todd W. Murray , Robin Mair , Priya Mukundhan , Jacob D. Dove , Xueping Ru , Jonathan Cohen , Timothy Kryman
CPC分类号： H01L22/12 , G01N29/04 , G01N29/06 , G01N29/0681 , G01N29/069 , G01N29/07 , G01N29/2418 , G01N29/46 , G01N2291/0289 , H01L21/76898 , H01L22/20
摘要： Advanced interconnect technologies such as Through Silicon Vias (TSVs) have become an integral part of 3-D integration. Methods and systems and provided for laser-based acoustic techniques in which a short laser pulse generates broadband acoustic waves that propagate in the TSV structure. An optical interferometer detects the surface displacement caused by the acoustic waves reflecting within the structure as well as other acoustic waves traveling near the surface that has information about the structure dimensions and irregularities, such as voids. Features of voids, such as their location, are also identified based on the characteristics of the acoustic wave as it propagates through the via. Measurements typically take few seconds per site and can be easily adopted for in-line process monitoring.
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6.发明申请CHARACTERIZATION WITH PICOSECOND ULTRASONICS OF METAL PORTIONS OF SAMPLES POTENTIALLY SUBJECT TO EROSION 有权表征可能潜在腐蚀的样品金属部分的PICOSECOND超声波公开(公告)号：US20100281981A1
公开(公告)日：2010-11-11
申请号：US12449837
申请日：2008-02-28
申请人： Guray Tas , Sean P. Leary , Dario Alliata , Jana Clerico , Priya Mukundhan , Zhongning Dai
发明人： Guray Tas , Sean P. Leary , Dario Alliata , Jana Clerico , Priya Mukundhan , Zhongning Dai
IPC分类号： G01H17/00
CPC分类号： G01N21/1717 , G01N21/95684 , G01N29/2418 , G01N2021/1725 , G01N2021/8416 , G01N2021/95638
摘要： A method for evaluating a manufacturing process is described. The method includes generating an optical pump beam pulse and directing the optical pump beam pulse to a surface of a sample. A probe pulse is generated and directed the probe pulse to the surface of the sample. A probe pulse response signal is detected. A change in the probe pulse varying in response to the acoustic signal forms the probe pulse response signal. An evaluation of one or more manufacturing process steps used to create the sample is made based upon the probe pulse response signal. Additionally the method may be used for process control of a CMP process. Apparatus are also described.
摘要翻译： 对制造工序的评价方法进行说明。 该方法包括产生光泵浦波束脉冲并将光泵浦波束脉冲引导到样品的表面。 产生探针脉冲并将探针脉冲引导到样品的表面。 探测脉冲响应信号。 响应于声信号变化的探针脉冲的变化形成探针脉冲响应信号。 基于探针脉冲响应信号进行用于产生样品的一个或多个制造工艺步骤的评估。 另外，该方法可以用于CMP过程的过程控制。 还描述了装置。
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