Invention Grant
- Patent Title: Dual scara arm
- Patent Title (中): 双sc臂
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Application No.: US13768495Application Date: 2013-02-15
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Publication No.: US09147590B2Publication Date: 2015-09-29
- Inventor: Antonio F. Pietrantonio , Anthony Chesna , Hakan Elmali , Ulysses Gilchrist
- Applicant: Brooks Automation, Inc.
- Applicant Address: US MA Chelmsford
- Assignee: Brooks Automation, Inc.
- Current Assignee: Brooks Automation, Inc.
- Current Assignee Address: US MA Chelmsford
- Agency: Perman & Green, LLP
- Agent Colin C. Durham
- Main IPC: H01L21/677
- IPC: H01L21/677 ; B25J9/04 ; H01L21/687
Abstract:
A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.
Public/Granted literature
- US20140056678A1 DUAL SCARA ARM Public/Granted day:2014-02-27
Information query
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