公开(公告)号：US20190096726A1

公开(公告)日：2019-03-28

申请号：US16201899

申请日：2018-11-27

Applicant: Brooks Automation, Inc.

Inventor： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC: H01L21/677 ,  H01L21/687 ,  B25J18/00 ,  B25J9/04

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

公开(公告)号：US10903104B2

公开(公告)日：2021-01-26

申请号：US16201899

申请日：2018-11-27

Applicant: Brooks Automation, Inc.

Inventor： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC: H01L21/67 ,  H01L21/677 ,  B25J9/04 ,  H01L21/687 ,  B25J18/00

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

公开(公告)号：US10141214B2

公开(公告)日：2018-11-27

申请号：US14868689

申请日：2015-09-29

Applicant: Brooks Automation, Inc.

Inventor： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC: H01L21/677 ,  B25J9/04 ,  H01L21/687 ,  B25J18/00

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

公开(公告)号：US09147590B2

公开(公告)日：2015-09-29

申请号：US13768495

申请日：2013-02-15

Applicant: Brooks Automation, Inc.

Inventor： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC: H01L21/677 ,  B25J9/04 ,  H01L21/687

CPC classification number: H01L21/67742 ,  B25J9/042 ,  B25J9/043 ,  B25J18/00 ,  H01L21/677 ,  H01L21/68707 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

Abstract translation: 一种基板输送装置，具有可操作地连接到驱动部分的驱动部分和sc ara臂，以移动sc臂。 镰刀臂有一个上臂和至少一个前臂。 前臂可移动地安装到上臂并且能够在其上保持基底。 上臂基本上是刚性的，并且可调节以改变上臂的预定尺寸。

公开(公告)号：US20160020126A1

公开(公告)日：2016-01-21

申请号：US14868689

申请日：2015-09-29

Applicant: Brooks Automation, Inc.

Inventor： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC: H01L21/677 ,  B25J18/00 ,  B25J9/04

CPC classification number: H01L21/67742 ,  B25J9/042 ,  B25J9/043 ,  B25J18/00 ,  H01L21/677 ,  H01L21/68707 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

Abstract translation: 一种基板输送装置，具有可操作地连接到驱动部分的驱动部分和sc ara臂，以移动sc臂。 镰刀臂有一个上臂和至少一个前臂。 前臂可移动地安装到上臂并且能够在其上保持基底。 上臂基本上是刚性的，并且可调节以改变上臂的预定尺寸。

公开(公告)号：US20140056678A1

公开(公告)日：2014-02-27

申请号：US13768495

申请日：2013-02-15

Applicant: Brooks Automation, Inc.

Inventor： Antonio F. Pietrantonio ,  Anthony Chesna ,  Hakan Elmali ,  Ulysses Gilchrist

IPC: H01L21/677

CPC classification number: H01L21/67742 ,  B25J9/042 ,  B25J9/043 ,  B25J18/00 ,  H01L21/677 ,  H01L21/68707 ,  Y10S901/15 ,  Y10S901/27 ,  Y10T74/20305

Abstract: A substrate transport apparatus having a drive section and a scara arm operably connected to the drive section to move the scara arm. The scara arm has an upper arm and at least one forearm. The forearm is movably mounted to the upper arm and capable of holding a substrate thereon. The upper arm is substantially rigid and is adjustable for changing a predetermined dimension of the upper arm.

Abstract translation: 一种基板输送装置，具有可操作地连接到驱动部分的驱动部分和sc ara臂，以移动sc臂。 镰刀臂有一个上臂和至少一个前臂。 前臂可移动地安装到上臂并且能够在其上保持基底。 上臂基本上是刚性的，并且可调节以改变上臂的预定尺寸。