Invention Grant
US09147748B1 Methods of forming replacement spacer structures on semiconductor devices
有权
在半导体器件上形成置换间隔结构的方法
- Patent Title: Methods of forming replacement spacer structures on semiconductor devices
- Patent Title (中): 在半导体器件上形成置换间隔结构的方法
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Application No.: US14267555Application Date: 2014-05-01
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Publication No.: US09147748B1Publication Date: 2015-09-29
- Inventor: Ruilong Xie , Xiuyu Cai , Ajey Poovannummoottil Jacob , Andreas Knorr , Christopher Prindle
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/283
- IPC: H01L21/283 ; H01L29/66 ; H01L21/311 ; H01L21/285 ; H01L29/45 ; H01L29/51 ; H01L29/49 ; H01L29/06 ; H01L29/78

Abstract:
One illustrative method disclosed herein includes removing the sidewall spacers and a gate cap layer so as to thereby expose an upper surface and sidewalls of a sacrificial gate structure, forming an etch stop layer above source/drain regions of a device and on the sidewalls and upper surface of the sacrificial gate structure, forming a first layer of insulating material above the etch stop layer, removing the sacrificial gate structure so as to define a replacement gate cavity that is laterally defined by portions of the etch stop layer, forming a replacement gate structure in the replacement gate cavity, and forming a second gate cap layer above the replacement gate structure.
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