Invention Grant
US09159593B2 Method of particle contaminant removal 有权
颗粒污染物去除方法

Method of particle contaminant removal
Abstract:
Apparatus and methods for removing particle contaminants from a solid surface includes providing a layer of a viscoelastic material on the solid surface. The viscoelastic material is applied as a thin film and exhibits substantial liquid-like characteristics. The viscoelastic material at least partially binds with the particle contaminants. A high velocity liquid is applied to the viscoelastic material, such that the viscoelastic material exhibits solid-like behavior. The viscoelastic material is thus dislodged from the solid surface along with the particle contaminants, thereby cleaning the solid surface of the particle contaminants.
Public/Granted literature
Information query
Patent Agency Ranking
0/0