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US09177852B2 Integrated circuits separated by through-wafer trench isolation 有权
通过晶圆沟槽隔离分离的集成电路

Integrated circuits separated by through-wafer trench isolation
Abstract:
An isolated semiconductor circuit comprising: a first sub-circuit and a second sub-circuit; a backend that includes an electrically isolating connector between the first and second sub-circuits; a lateral isolating trench between the semiconductor portions of the first and second sub-circuits, wherein the lateral isolating trench extends along the width of the semiconductor portions of the first and second sub-circuits, wherein one end of the isolating trench is adjacent the backend, and wherein the isolating trench is filled with an electrically isolating material.
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