Invention Grant
- Patent Title: Silicon-on-insulator high power amplifiers
- Patent Title (中): 绝缘体上的绝缘体大功率放大器
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Application No.: US13797111Application Date: 2013-03-12
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Publication No.: US09190269B2Publication Date: 2015-11-17
- Inventor: Saeed Mohammadi , Sultan R. Helmi , Jing-Hwa Chen , Hossein Pajouhi
- Applicant: Purdue Research Foundation
- Applicant Address: US IN West Lafayette
- Assignee: PURDUE RESEARCH FOUNDATION
- Current Assignee: PURDUE RESEARCH FOUNDATION
- Current Assignee Address: US IN West Lafayette
- Agency: Purdue Research Foundation
- Main IPC: H03F3/16
- IPC: H03F3/16 ; H03F3/14 ; H01L21/02 ; H03F3/21 ; H03F3/42 ; H03F3/45 ; H03F1/02 ; H01L27/12

Abstract:
Illustrative embodiments of power amplifiers and associated methods are disclosed. In at least one embodiment, a method may include fabricating a power amplifier in a first silicon layer of a silicon-on-insulator (SOI) substrate, wherein the SOI substrate comprises the first silicon layer, a second silicon layer, and a buried oxide layer disposed between the first and second silicon layers; removing at least some of the second silicon layer from the SOI substrate, after fabricating the power amplifier; and securing the SOI substrate, after removing at least some of the second silicon layer, to an electrically non-conductive and thermally conductive substrate.
Public/Granted literature
- US20130307626A1 Silicon-on-Insulator High Power Amplifiers Public/Granted day:2013-11-21
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