Invention Grant
- Patent Title: Liquid processing apparatus
- Patent Title (中): 液体处理设备
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Application No.: US14141605Application Date: 2013-12-27
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Publication No.: US09192878B2Publication Date: 2015-11-24
- Inventor: Shogo Mizota , Takashi Yabuta , Tatsuya Nagamatsu , Daisuke Saiki
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo
- Agency: Pearne & Gordon LLP
- Priority: JP2012-288725 20121228
- Main IPC: B01D19/00
- IPC: B01D19/00 ; H01L21/67

Abstract:
A liquid processing apparatus and a chemical liquid collecting method can suppress corrosion of wirings formed on a substrate. The liquid processing apparatus includes a processing unit configured to perform a liquid process by supplying a chemical liquid to a substrate; a collecting line configured to collect the chemical liquid supplied to the processing unit; a supply line configured to supply the collected chemical liquid to the processing unit; and a gas supply unit configured to supply an inert gas into the collecting line.
Public/Granted literature
- US20140182455A1 LIQUID PROCESSING APPARATUS Public/Granted day:2014-07-03
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