Invention Grant
- Patent Title: High-voltage metal-oxide semiconductor transistor and method of fabricating the same
- Patent Title (中): 高压金属氧化物半导体晶体管及其制造方法
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Application No.: US14273538Application Date: 2014-05-08
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Publication No.: US09196695B2Publication Date: 2015-11-24
- Inventor: Kun-Huang Yu , Shih-Yin Hsiao , Wen-Fang Lee , Shu-Wen Lin , Kuan-Chuan Chen
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Priority: CN201410136033 20140404
- Main IPC: H01L29/76
- IPC: H01L29/76 ; H01L29/423 ; H01L29/78 ; H01L29/66 ; H01L29/40 ; H01L29/08 ; H01L21/266 ; H01L21/28

Abstract:
The present invention provides a high-voltage metal-oxide-semiconductor (HVMOS) transistor comprising a substrate, a gate dielectric layer, a gate electrode and a source and drain region. The gate dielectric layer is disposed on the substrate and includes a protruded portion and a recessed portion, wherein the protruded portion is disposed adjacent to two sides of the recessed portion and has a thickness greater than a thickness of the recessed portion. The gate electrode is disposed on the gate dielectric layer. Thus, the protruded portion of the gate dielectric layer can maintain a higher breakdown voltage, thereby keeping the current from leaking through the gate.
Public/Granted literature
- US20150287797A1 HIGH-VOLTAGE METAL-OXIDE SEMICONDUCTOR TRANSISTOR AND METHOD OF FABRICATING THE SAME Public/Granted day:2015-10-08
Information query
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