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US09209013B2 Constructions comprising thermally conductive stacks containing rutile-type titanium oxide 有权
包括含有金红石型氧化钛的导热叠层的结构

Constructions comprising thermally conductive stacks containing rutile-type titanium oxide
Abstract:
Some embodiments include methods of forming rutile-type titanium oxide. A monolayer of titanium nitride may be formed. The monolayer of titanium nitride may then be oxidized at a temperature less than or equal to about 550° C. to convert it into a monolayer of rutile-type titanium oxide. Some embodiments include methods of forming capacitors that have rutile-type titanium oxide dielectric, and that have at least one electrode comprising titanium nitride. Some embodiments include thermally conductive stacks that contain titanium nitride and rutile-type titanium oxide, and some embodiments include methods of forming such stacks.
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