Invention Grant
- Patent Title: Methods of removing gate cap layers in CMOS applications
- Patent Title (中): 在CMOS应用中去除栅极帽层的方法
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Application No.: US13792540Application Date: 2013-03-11
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Publication No.: US09224655B2Publication Date: 2015-12-29
- Inventor: Peter Javorka , Ralf Richter , Stefan Flachowsky , Jan Hoentschel
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/311
- IPC: H01L21/311 ; H01L21/8238 ; H01L29/66

Abstract:
One illustrative method disclosed herein includes the steps of forming a masking layer that covers a P-type transistor and exposes at least a gate cap layer of an N-type transistor, performing a first etching process through the masking layer to remove a portion of the gate cap of the N-type transistor so as to thereby define a reduced thickness gate cap layer for the N-type transistor, removing the masking layer, and performing a common second etching process on the P-type transistor and the N-type transistor that removes a gate cap layer of the P-type transistor and the reduced thickness gate cap of the N-type transistor.
Public/Granted literature
- US20140256135A1 METHODS OF REMOVING GATE CAP LAYERS IN CMOS APPLICATIONS Public/Granted day:2014-09-11
Information query
IPC分类: