Invention Grant
US09231131B2 Integrated photodetector waveguide structure with alignment tolerance
有权
集成光电探测器波导结构具有对准公差
- Patent Title: Integrated photodetector waveguide structure with alignment tolerance
- Patent Title (中): 集成光电探测器波导结构具有对准公差
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Application No.: US14148988Application Date: 2014-01-07
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Publication No.: US09231131B2Publication Date: 2016-01-05
- Inventor: Solomon Assefa , Bruce W. Porth , Steven M. Shank
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Steven Meyers
- Main IPC: H01L31/0232
- IPC: H01L31/0232 ; H01L31/18 ; H01L31/028
Abstract:
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
Public/Granted literature
- US20150194543A1 INTEGRATED PHOTODETECTOR WAVEGUIDE STRUCTURE WITH ALIGNMENT TOLERANCE Public/Granted day:2015-07-09
Information query
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