Invention Grant
- Patent Title: Coating apparatus and method for filling coating liquid
- Patent Title (中): 喷涂装置和填充涂液的方法
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Application No.: US13921286Application Date: 2013-06-19
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Publication No.: US09238245B2Publication Date: 2016-01-19
- Inventor: Takayuki Ishii , Kimio Motoda , Takashi Terada , Atsushi Yamashita , Shigeto Tsuruta
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2012-144754 20120627
- Main IPC: B05C5/02
- IPC: B05C5/02 ; H01L21/67

Abstract:
A coating apparatus includes a nozzle, a moving mechanism, a pressure adjusting unit and a pressure control unit. The nozzle is provided with a storage chamber and a slit-like flow path, and configured to discharge the coating liquid from a discharge port formed at a front end of the flow path. The moving mechanism moves the nozzle and a substrate relatively to each other along the surface of the substrate. The pressure adjusting unit adjusts the pressure inside the storage chamber. The pressure control unit controls the pressure adjusting unit so as to adjust pressure inside the storage chamber. The pressure control unit controls the pressure adjusting unit such that the inside of the storage chamber becomes a negative pressure, and fills the coating liquid inside the storage chamber while slowly decreasing the negative pressure inside the storage chamber.
Public/Granted literature
- US20140000518A1 COATING APPARATUS AND METHOD FOR FILLING COATING LIQUID Public/Granted day:2014-01-02
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