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US09240407B2 Integrated diode array and corresponding manufacturing method 有权
集成二极管阵列及相应的制造方法

Integrated diode array and corresponding manufacturing method
Abstract:
An integrated diode array and a corresponding manufacturing method are provided. The integrated diode array includes a substrate having an upper side, and a plurality of blocks of several diodes, which are positioned in a planar manner and are suspended at the substrate above a cavity situated below them in the substrate. The blocks are separated from one another by respective gaps, and within a specific block, the individual diodes are electrically insulated from one another by first STI trenches situated between them.
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