Invention Grant
US09269598B2 Semiconductor device and method of forming an IPD over a high-resistivity encapsulant separated from other IPDS and baseband circuit
有权
在与其他IPDS和基带电路分离的高电阻率密封剂上形成IPD的半导体器件和方法
- Patent Title: Semiconductor device and method of forming an IPD over a high-resistivity encapsulant separated from other IPDS and baseband circuit
- Patent Title (中): 在与其他IPDS和基带电路分离的高电阻率密封剂上形成IPD的半导体器件和方法
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Application No.: US13569105Application Date: 2012-08-07
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Publication No.: US09269598B2Publication Date: 2016-02-23
- Inventor: Yaojian Lin , Jianmin Fang , Kang Chen , Haijing Cao
- Applicant: Yaojian Lin , Jianmin Fang , Kang Chen , Haijing Cao
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC, Ltd.
- Current Assignee: STATS ChipPAC, Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L27/08
- IPC: H01L27/08 ; H01L21/56 ; H01L21/683 ; H01L25/16 ; H01L25/00 ; H01L25/03 ; H01L23/538 ; H01L23/00

Abstract:
A semiconductor device has a first conductive layer formed over a sacrificial substrate. A first integrated passive device (IPD) is formed in a first region over the first conductive layer. A conductive pillar is formed over the first conductive layer. A high-resistivity encapsulant greater than 1.0 kohm-cm is formed over the first IPD to a top surface of the conductive pillar. A second IPD is formed over the encapsulant. The first encapsulant has a thickness of at least 50 micrometers to vertically separate the first and second IPDs. An insulating layer is formed over the second IPD. The sacrificial substrate is removed and a second semiconductor die is disposed on the first conductive layer. A first semiconductor die is formed in a second region over the substrate. A second encapsulant is formed over the second semiconductor die and a thermally conductive layer is formed over the second encapsulant.
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