Invention Grant
- Patent Title: Compact ampoule thermal management system
- Patent Title (中): 紧凑型安瓿热管理系统
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Application No.: US13902310Application Date: 2013-05-24
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Publication No.: US09279604B2Publication Date: 2016-03-08
- Inventor: David K. Carlson , Errol Antonio C. Sanchez , Kenric Choi , Marcel E. Josephson , Dennis Demars , Emre Cuvalci , Mehmet Tugrul Samir
- Applicant: APPLIED MATERIALS, INC.
- Applicant Address: US CA Santa Clara
- Assignee: APPLIED MATERIALS, INC.
- Current Assignee: APPLIED MATERIALS, INC.
- Current Assignee Address: US CA Santa Clara
- Agency: Moser Taboada
- Agent Alan Taboada
- Main IPC: F25B21/02
- IPC: F25B21/02 ; C23C16/448

Abstract:
Methods and apparatus for thermal management of a precursor for use in substrate processing are provided herein. In some embodiments, an apparatus for thermal management of a precursor for use in substrate processing may include a body having an opening sized to receive a storage container having a liquid or solid precursor disposed therein, the body fabricated from thermally conductive material; one or more thermoelectric devices coupled to the body proximate the opening; a heat sink coupled to the one or more thermoelectric devices; and a fan disposed proximate to a back side of the heat sink to provide a flow of air to the heat sink.
Public/Granted literature
- US20130319015A1 COMPACT AMPOULE THERMAL MANAGEMENT SYSTEM Public/Granted day:2013-12-05
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