Invention Grant
- Patent Title: Substrate for carbon nanotube growth and method for manufacturing the same
- Patent Title (中): 碳纳米管生长用基板及其制造方法
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Application No.: US14095447Application Date: 2013-12-03
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Publication No.: US09289753B2Publication Date: 2016-03-22
- Inventor: Toshiyuki Ohashi , Toshio Tokune , Masahiro Ohta , Ryogo Kato , Toshiyuki Shima
- Applicant: HONDA MOTOR CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: HONDA MOTOR CO., LTD.
- Current Assignee: HONDA MOTOR CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Rankin, Hill & Clark LLP
- Priority: JP2012-265824 20121204; JP2013-246432 20131128
- Main IPC: C23C14/34
- IPC: C23C14/34 ; B01J23/78 ; B01J37/02 ; B01J37/34 ; B01J23/745 ; B82Y30/00 ; B82Y40/00 ; C23C14/08 ; C23C14/18 ; C23C14/58

Abstract:
Provided is a substrate for carbon nanotube growth in which no metal particles as a catalyst aggregates and a method for manufacturing the substrate. A substrate for carbon nanotube growth 1 includes a base plate 2, a catalyst 3, a form-defining material layer 4 which allows the catalyst 3 to be dispersed and arranged, and a covering layer 5 which has a metal oxide to cover the catalyst. A method for manufacturing a substrate for carbon nanotube growth 1 includes a step of sputtering on a base plate 2 a metal which forms a catalyst 3 and oxidizing the surface of the metal, a step of sputtering a form-defining material on the base plate 2, and a step of further sputtering on the form-defining material a metal which forms a catalyst 3 and oxidizing the surface of the metal.
Public/Granted literature
- US20140155251A1 SUBSTRATE FOR CARBON NANOTUBE GROWTH AND METHOD FOR MANUFACTURING THE SAME Public/Granted day:2014-06-05
Information query
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