Invention Grant
- Patent Title: Semiconductor structure including a ferroelectric transistor and method for the formation thereof
- Patent Title (中): 包括铁电晶体管的半导体结构及其形成方法
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Application No.: US14445893Application Date: 2014-07-29
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Publication No.: US09293556B2Publication Date: 2016-03-22
- Inventor: Ralf van Bentum , Jongsin Yun , Seunghwan Seo , Joerg Schmid
- Applicant: GLOBALFOUNDRIES Inc.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee: GLOBALFOUNDRIES Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Amerson Law Firm, PLLC
- Main IPC: H01L21/00
- IPC: H01L21/00 ; H01L29/51 ; H01L27/088 ; H01L21/28

Abstract:
An illustrative semiconductor structure described herein includes a substrate including a logic transistor region, a ferroelectric transistor region and an input/output transistor region. A logic transistor is provided at the logic transistor region. The logic transistor includes a gate dielectric and a gate electrode. An input/output transistor is provided at the input/output transistor region. The input/output transistor includes a gate dielectric and a gate electrode. The gate dielectric of the input/output transistor has a greater thickness than the gate dielectric of the logic transistor. A ferroelectric transistor is provided at the ferroelectric transistor region. The ferroelectric transistor includes a ferroelectric dielectric and a gate electrode. The ferroelectric dielectric is arranged between the ferroelectric transistor region and the gate electrode of the ferroelectric transistor.
Public/Granted literature
- US20160035856A1 SEMICONDUCTOR STRUCTURE INCLUDING A FERROELECTRIC TRANSISTOR AND METHOD FOR THE FORMATION THEREOF Public/Granted day:2016-02-04
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