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US09293556B2 Semiconductor structure including a ferroelectric transistor and method for the formation thereof 有权
包括铁电晶体管的半导体结构及其形成方法

Semiconductor structure including a ferroelectric transistor and method for the formation thereof
Abstract:
An illustrative semiconductor structure described herein includes a substrate including a logic transistor region, a ferroelectric transistor region and an input/output transistor region. A logic transistor is provided at the logic transistor region. The logic transistor includes a gate dielectric and a gate electrode. An input/output transistor is provided at the input/output transistor region. The input/output transistor includes a gate dielectric and a gate electrode. The gate dielectric of the input/output transistor has a greater thickness than the gate dielectric of the logic transistor. A ferroelectric transistor is provided at the ferroelectric transistor region. The ferroelectric transistor includes a ferroelectric dielectric and a gate electrode. The ferroelectric dielectric is arranged between the ferroelectric transistor region and the gate electrode of the ferroelectric transistor.
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