Invention Grant
- Patent Title: Electron tube
- Patent Title (中): 电子管
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Application No.: US14425917Application Date: 2013-07-31
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Publication No.: US09299530B2Publication Date: 2016-03-29
- Inventor: Yasumasa Hamana , Takaaki Nagata , Kimitsugu Nakamura
- Applicant: HAMAMATSU PHOTONICS K.K.
- Applicant Address: JP Hamamatsu-shi, Shizuoka
- Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee: HAMAMATSU PHOTONICS K.K.
- Current Assignee Address: JP Hamamatsu-shi, Shizuoka
- Agency: Drinker Biddle & Reath LLP
- Priority: JP2012-195215 20120905
- International Application: PCT/JP2013/070735 WO 20130731
- International Announcement: WO2014/038317 WO 20140313
- Main IPC: H01J31/50
- IPC: H01J31/50 ; H01J29/86 ; H01J5/10 ; H01J29/88 ; H01J5/08 ; H01J40/18

Abstract:
In an electron tube, an atomic layer deposition method is used to form an electrical resistance film having a stacked structure of electrically insulating layers and electrically conductive layers or a mixed structure of an electrically insulating material and an electrically conductive material, so as to cover the whole of an inner wall surface and an outer wall surface of a second envelope. By use of the atomic layer deposition method, the firm and fine electrical resistance film with a desired resistance can be formed on an insulation surface, without containing a material such as a binder. When the electrical resistance film is provided with slight electrical conductivity, it can suppress occurrence of withstand voltage failure due to electrification of the insulation surface or the like and realize stability of withstand voltage characteristics.
Public/Granted literature
- US20150228439A1 ELECTRON TUBE Public/Granted day:2015-08-13
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