Repeller, cathode, chamber wall and slit member for ion implanter and ion generating devices including the same

    公开(公告)号:US10796878B2

    公开(公告)日:2020-10-06

    申请号:US16583183

    申请日:2019-09-25

    Inventor: Kyou Tae Hwang

    Abstract: Provided are elements for an ion implanter and an ion generating device including the same. The elements include a repeller, a cathode, a chamber wall, and a slit member constituting an arc chamber of an ion generating device for ion implantation used in the fabrication of a semiconductor device. A coating structure including a semicarbide layer is provided to each of the elements in order to stabilize the element against thermal deformation, protect the element from wear, and prevent a deposition product from being peeled off. The coating structure enables precise ion implantation without a change in the position of ion generation or distortion of the equipment. The coating structure allows electrons to be uniformly reflected into the arc chamber to increase the uniformity of plasma, resulting in an improvement in the dissociation efficiency of an ion source gas. The coating structure significantly improves the service life of the element compared to those of existing elements. Also provided are ion generating devices including the elements.

    Repeller, cathode, chamber wall and slit member for ion implanter and ion generating devices including the same

    公开(公告)号:US10573486B2

    公开(公告)日:2020-02-25

    申请号:US15742283

    申请日:2016-06-10

    Inventor: Kyou Tae Hwang

    Abstract: Provided are elements for an ion implanter and an ion generating device including the same. The elements include a repeller, a cathode, a chamber wall, and a slit member constituting an arc chamber of an ion generating device for ion implantation used in the fabrication of a semiconductor device. A coating structure including a semicarbide layer is provided to each of the elements in order to stabilize the element against thermal deformation, protect the element from wear, and prevent a deposition product from being peeled off. The coating structure enables precise ion implantation without a change in the position of ion generation or distortion of the equipment. The coating structure allows electrons to be uniformly reflected into the arc chamber to increase the uniformity of plasma, resulting in an improvement in the dissociation efficiency of an ion source gas. The coating structure significantly improves the service life of the element compared to those of existing elements. Also provided are ion generating devices including the elements.

    Lamp with improved photometric distribution
    3.
    发明授权
    Lamp with improved photometric distribution 失效
    具有改善光度分布的灯

    公开(公告)号:US4988911A

    公开(公告)日:1991-01-29

    申请号:US270348

    申请日:1988-10-17

    Applicant: Jack V. Miller

    Inventor: Jack V. Miller

    CPC classification number: F21V3/04 F21V3/02 H01J5/10 H01K1/28

    Abstract: A light bulb is provided has a lamp base electrically connecting a radiant light source and supporting the light source on a central axis. An envelope is supported from the base, comprising a generally tubular transmissive portion adjacent to the base and a generally reflective portion contiguous with the transmissive portion and completing enclosure of the light source. The reflective portion is in the form of a concave curve of revolution having a first focus at the light source and configured to direct the light from the source through the transmissive portion of the envelope at approximately a 45.degree. angle from the central axis, and wherein the 45.degree. angle is rotated to form a depending cone of light. A preferred embodiment has an envelope including a partially transmissive reflector and a tubular window as an optically transmissive light diffuser.

    Abstract translation: 提供了一种灯泡,其具有将辐射光源电连接并将光源支撑在中心轴上的灯座。 信封从底座支撑,包括与基座相邻的大致管状的透射部分和与透射部分相邻并且完成光源的外壳的大致反射部分。 反射部分是具有在光源处具有第一焦点的旋转凹曲线的形式,并且被配置成将来自光源的光通过外壳的透射部分与中心轴成大约45度角,并且其中 旋转45°角以形成依赖的光锥。 优选实施例具有包括部分透射的反射器和作为光学透射光扩散器的管状窗口的外壳。

    Thick-film circuit device
    4.
    发明授权
    Thick-film circuit device 失效
    厚膜电路器件

    公开(公告)号:US4215290A

    公开(公告)日:1980-07-29

    申请号:US958392

    申请日:1978-11-07

    CPC classification number: H01J63/02 H05K1/0306 H05K3/4685

    Abstract: A thick-film circuit device having a substrate of insulating material containing alkali components, a first crossover made of non-alkali type glass and formed on the substrate, wiring conductors formed on the first crossover according to a predetermined circuit pattern, and a second crossover made of glass and formed on the first crossover so that it covers the wiring conductors, the first crossover preventing entry of sodium ions into the second crossover.

    Abstract translation: 一种厚膜电路装置,具有含有碱成分的绝缘材料的基板,由非碱金属玻璃制成的第一交叉,并形成在基板上,根据规定电路图形成在第一交叉点上的布线导体和第二交叉 由玻璃制成并形成在第一个交叉点上,使其覆盖布线导体,第一个交叉防止钠离子进入第二个交叉点。

    Discharge lamp having overlaid fluorescent coatings and methods of making the same
    5.
    发明授权
    Discharge lamp having overlaid fluorescent coatings and methods of making the same 失效
    具有覆盖荧光涂层的放电灯及其制造方法

    公开(公告)号:US06919676B2

    公开(公告)日:2005-07-19

    申请号:US10462202

    申请日:2003-06-16

    CPC classification number: H01J5/10 A61N5/0614 H01J61/30 H01J61/42 H01J61/48

    Abstract: Disclosed is a new and useful discharge lamp for use in applications, such as tanning and technical lighting, and a method of making the same. The discharge lamp includes, inter alia, a vitreous tube having an axial length, a base phosphor coating applied on the interior of the tube along the entire axial length, and at least one phosphor over-coat applied over the base phosphor coating in one or more axial regions of the vitreous tube. The phosphor over-coat is applied to less than the total length of the vitreous tube. In a representative embodiment, the vitreous tube has an outer periphery which is smooth, but in alternate embodiments, a helical groove path is formed therein over at least a portion of the axial length.

    Abstract translation: 公开了一种用于诸如鞣制和技术照明的应用中的新型有用的放电灯及其制造方法。 放电灯尤其包括具有轴向长度的玻璃体管,沿着整个轴向长度施加在管内部的基底荧光体涂层,以及至少一个磷光体覆盖层,涂覆在基底荧光体涂层上的一个或多个 更多的轴向区域的玻璃体管。 荧光粉外涂层施加到小于玻璃体管的总长度。 在代表性的实施例中,玻璃体管具有平滑的外周边,但是在替代实施例中,在轴向长度的至少一部分上形成螺旋槽路径。

    Method of logging a borehole
    6.
    发明申请
    Method of logging a borehole 有权
    井眼测井方法

    公开(公告)号:US20050056774A1

    公开(公告)日:2005-03-17

    申请号:US10661851

    申请日:2003-09-12

    Applicant: James Samworth

    Inventor: James Samworth

    CPC classification number: G01V5/107 G01V5/104

    Abstract: In the field of wellbore data logging it is known to use isotopic neutron sources in a neutron capture logging technique. However, continuous isotopic sources are unpopular for regulatory and safety reasons. Attempts to employ neutron generator tubes to generate neutron bursts for use in the neutron capture technique have encountered various difficulties in areas connected with signal identification and processing. The disclosure relates to a method of data logging in which a low burst rate neutron generator tube is pulsed at comparatively low rates to generate neutron bursts that are captured in atomic nuclei in a proximal formation. The gamma radiation arising from the neutron capture is detected over a gating intervals defined by temporally distinct points. The gamma detector output is integrated over the gating interval to provide a measure of the decay rate that is independent of the pulse rate. Consequently the signal processing problems do not arise.

    Abstract translation: 在井眼数据记录领域,已知在中子捕获测井技术中使用同位素中子源。 然而,由于监管和安全原因,连续同位素来源不受欢迎。 使用中子发生器管产生用于中子捕获技术的中子爆发的尝试在与信号识别和处理相关的领域遇到了各种困难。 本公开涉及一种数据记录方法,其中低脉冲率中子发生器管以相对较低的速率脉冲以产生在近端地层中的原子核中捕获的中子脉冲。 在由时间上不同的点定义的选通间隔上检测由中子捕获产生的伽马辐射。 伽马检测器输出在门控间隔上积分,以提供与脉率无关的衰减速率的量度。 因此,不会出现信号处理问题。

    Optical fiber sensor having shaped ends
    8.
    发明授权
    Optical fiber sensor having shaped ends 失效
    具有成形端的光纤传感器

    公开(公告)号:US4617460A

    公开(公告)日:1986-10-14

    申请号:US599944

    申请日:1984-04-13

    CPC classification number: G01B11/00 G01B11/026

    Abstract: In an optical fiber sensor comprising an optical fiber coupled with a light emission element and another optical fiber coupled with a light receiving element, end portions of the optical fibers other than those coupled with the aforementioned elements being arranged side by side and joined together in a closely contacting relation with the end surfaces of the optical fibers placed in opposition to a slit member to be detected such that the arranged direction of the optical fibers is aligned with a shifting direction of the slit member; the end portions of the optical fibers are formed into a flat configuration and joined together such that the flat side surfaces of the two fibers are brought into a surface contacting relation.

    Abstract translation: 在包括与光发射元件耦合的光纤和与光接收元件耦合的另一光纤的光纤传感器中,除了与上述元件耦合的光纤之外的光纤的端部被并排布置并且在一个 与被检测的狭缝部件相对配置的光纤的端面紧密接触,使得光纤的布置方向与狭缝部件的移动方向对齐; 光纤的端部形成为扁平构造并且接合在一起,使得两个光纤的平坦侧表面成为表面接触关系。

    Electron tube
    9.
    发明授权
    Electron tube 有权
    电子管

    公开(公告)号:US09299530B2

    公开(公告)日:2016-03-29

    申请号:US14425917

    申请日:2013-07-31

    Abstract: In an electron tube, an atomic layer deposition method is used to form an electrical resistance film having a stacked structure of electrically insulating layers and electrically conductive layers or a mixed structure of an electrically insulating material and an electrically conductive material, so as to cover the whole of an inner wall surface and an outer wall surface of a second envelope. By use of the atomic layer deposition method, the firm and fine electrical resistance film with a desired resistance can be formed on an insulation surface, without containing a material such as a binder. When the electrical resistance film is provided with slight electrical conductivity, it can suppress occurrence of withstand voltage failure due to electrification of the insulation surface or the like and realize stability of withstand voltage characteristics.

    Abstract translation: 在电子管中,使用原子层沉积法形成具有电绝缘层和导电层的叠层结构或电绝缘材料和导电材料的混合结构的电阻膜,以覆盖 整个内壁表面和第二外壳的外壁表面。 通过使用原子层沉积方法,可以在绝缘表面上形成具有所需电阻的牢固且精细的电阻膜,而不含粘合剂等材料。 当电阻膜具有轻微的导电性时,可以抑制由于绝缘表面等引起的耐电压故障的发生,并且实现耐电压特性的稳定性。

    Ion generation method and ion source
    10.
    发明授权
    Ion generation method and ion source 有权
    离子生成法和离子源

    公开(公告)号:US09208983B2

    公开(公告)日:2015-12-08

    申请号:US14011575

    申请日:2013-08-27

    Inventor: Masateru Sato

    Abstract: An ion generation method uses a direct current discharge ion source provided with an arc chamber formed of a high melting point material, and includes: generating ions by causing molecules of a source gas to collide with thermoelectrons in the arc chamber and producing plasma discharge; and causing radicals generated in generating ions to react with a liner provided to cover an inner wall of the arc chamber at least partially. The liner is formed of a material more reactive to radicals generated as the source gas is dissociated than the material of the arc chamber.

    Abstract translation: 离子产生方法使用设置有由高熔点材料形成的电弧室的直流放电离子源,并且包括:通过使源气体的分子与电弧室中的热电子碰撞并产生等离子体放电而产生离子; 并且使产生离子产生的自由基与至少部分地覆盖电弧室的内壁的衬垫反应。 衬垫由与源电极气体相比所产生的自由基反应的材料形成为比电弧室的材料更为反应。

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