Invention Grant
- Patent Title: Pre-aligned nozzle/skimmer
- Patent Title (中): 预排列喷嘴/撇渣器
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Application No.: US14151151Application Date: 2014-01-09
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Publication No.: US09305746B2Publication Date: 2016-04-05
- Inventor: Robert K. Becker , Avrum Freytsis
- Applicant: TEL Epion Inc.
- Applicant Address: US MA Billerica
- Assignee: TEL Epion Inc.
- Current Assignee: TEL Epion Inc.
- Current Assignee Address: US MA Billerica
- Agency: Wood, Herron & Evans, LLP
- Main IPC: H01J37/30
- IPC: H01J37/30 ; H01J37/08
Abstract:
A method of assembling a nozzle/skimmer module includes coupling a nozzle assembly and skimmer cartridge assembly in a rigid tandem configuration to more accurately control the formation of the Gas Cluster Ion Beam (GCIB). The nozzle/skimmer module is pre-aligned before installation in a production GCIB processing system to more accurately position the GCIB.
Public/Granted literature
- US20140123457A1 PRE-ALIGNED NOZZLE/SKIMMER Public/Granted day:2014-05-08
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