Invention Grant
- Patent Title: Mass transfer tool manipulator assembly
- Patent Title (中): 传质工具机械手组装
-
Application No.: US13776158Application Date: 2013-02-25
-
Publication No.: US09308649B2Publication Date: 2016-04-12
- Inventor: Dariusz Golda , John A. Higginson , Andreas Bibl , Paul Argus Parks , Stephen Paul Bathurst
- Applicant: LuxVue Technology Corporation
- Applicant Address: US CA Santa Clara
- Assignee: LuxVue Techonology Corporation
- Current Assignee: LuxVue Techonology Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Blakely, Sokoloff, Taylor & Zafman LLP
- Main IPC: B25J7/00
- IPC: B25J7/00 ; B25J15/00 ; B25J9/00 ; B25J17/02 ; H01L21/67 ; H01L23/00

Abstract:
Systems and methods for transferring a micro device from a carrier substrate are disclosed. In an embodiment, a mass transfer tool manipulator assembly allows active alignment between an array of electrostatic transfer heads on a micro pick up array and an array of micro devices on a carrier substrate. Displacement of a compliant element of the mass transfer tool manipulator assembly may be sensed to control alignment between the array of electrostatic transfer heads and the array of micro devices.
Public/Granted literature
- US20140241843A1 Mass Transfer Tool Manipulator Assembly Public/Granted day:2014-08-28
Information query