Invention Grant
- Patent Title: Method for manufacturing organic electroluminescent element with bi-layer cathode
- Patent Title (中): 用双层阴极制造有机电致发光元件的方法
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Application No.: US14368567Application Date: 2013-03-08
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Publication No.: US09312488B2Publication Date: 2016-04-12
- Inventor: Masaki Aonuma , Takuya Satoh , Akira Takiguchi , Yoichiro Yashiro
- Applicant: JOLED INC.
- Applicant Address: JP Tokyo
- Assignee: JOLED INC.
- Current Assignee: JOLED INC.
- Current Assignee Address: JP Tokyo
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2012-171343 20120801
- International Application: PCT/JP2013/001503 WO 20130308
- International Announcement: WO2014/020788 WO 20140206
- Main IPC: H01L51/00
- IPC: H01L51/00 ; H01L51/52 ; C23C14/08
Abstract:
A method of forming an upper electrode in an organic electroluminescent element is provided. A first film made of a material for the upper electrode is formed on an organic functional layer by magnetron sputtering under a first condition. Thereafter, a second film made of the material for the upper electrode is formed on the first film by magnetron sputtering under a second condition different from the first condition. The second film has a lower film stress than the first film.
Public/Granted literature
- US20140349432A1 METHOD FOR MANUFACTURING ORGANIC ELECTROLUMINESCENT ELEMENT Public/Granted day:2014-11-27
Information query
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