Abstract:
A method of forming an upper electrode in an organic electroluminescent element is provided. A first film made of a material for the upper electrode is formed on an organic functional layer by magnetron sputtering under a first condition. Thereafter, a second film made of the material for the upper electrode is formed on the first film by magnetron sputtering under a second condition different from the first condition. The second film has a lower film stress than the first film.
Abstract:
An organic EL element is provided having a pair of electrodes and an organic functional layer disposed therebetween, the pair of electrodes consisting of an upper electrode and a lower electrode. In the pair of electrodes, the upper electrode includes a first layer and a second layer, the first layer being in contact with the organic functional layer and the second layer being in contact with the first layer. Additionally, the first layer has a higher membrane stress than the organic functional layer and the second layer. Furthermore, the first layer has a crystalline structure and the second layer has a non-crystalline structure.
Abstract:
A method of manufacturing an organic EL element having a pair of electrodes and an organic functional layer disposed therebetween, the pair of electrodes consisting of an upper electrode and a lower electrode, comprising: forming the upper electrode on the organic functional layer by a magnetron sputtering method with a film-forming power density no less than 4.5 W/cm2 and no greater than 9.0 W/cm2.
Abstract translation:一种制造具有一对电极和设置在其间的有机功能层的有机EL元件的方法,所述一对电极由上电极和下电极组成,包括:通过磁控溅射在有机功能层上形成上电极 方法,其成膜功率密度不小于4.5W / cm 2且不大于9.0W / cm 2。
Abstract:
An organic electroluminescent element including: a lower electrode; an organic functional layer on the lower electrode; and an upper electrode on the organic functional layer, wherein profile of an upper surface of the upper electrode has a skewness of between −0.5 and 0.7 inclusive.