公开(公告)号：US09312488B2

公开(公告)日：2016-04-12

申请号：US14368567

申请日：2013-03-08

Applicant: JOLED INC.

Inventor： Masaki Aonuma ,  Takuya Satoh ,  Akira Takiguchi ,  Yoichiro Yashiro

IPC: H01L51/00 ,  H01L51/52 ,  C23C14/08

CPC classification number: H01L51/0021 ,  C23C14/086 ,  H01L51/5234 ,  H01L2251/308 ,  H01L2251/5315

Abstract: A method of forming an upper electrode in an organic electroluminescent element is provided. A first film made of a material for the upper electrode is formed on an organic functional layer by magnetron sputtering under a first condition. Thereafter, a second film made of the material for the upper electrode is formed on the first film by magnetron sputtering under a second condition different from the first condition. The second film has a lower film stress than the first film.

Abstract translation: 提供了在有机电致发光元件中形成上电极的方法。 在第一条件下通过磁控溅射在有机功能层上形成由上电极材料制成的第一膜。 此后，在与第一条件不同的第二条件下，通过磁控溅射在第一膜上形成由上电极材料制成的第二膜。 第二膜具有比第一膜更低的膜应力。

公开(公告)号：US09909205B2

公开(公告)日：2018-03-06

申请号：US15124145

申请日：2015-02-24

Applicant: JOLED INC.

Inventor： Akira Takiguchi

IPC: H01L29/18 ,  H01L51/05 ,  H01L29/08 ,  C23C14/24 ,  H05B33/10 ,  C23C14/56 ,  C23C14/54 ,  H01L51/56 ,  H01L51/00

CPC classification number: C23C14/243 ,  C23C14/542 ,  C23C14/564 ,  H01L51/001 ,  H01L51/0508 ,  H01L51/56 ,  H05B33/10

Abstract: A vapor deposition apparatus including: a chamber that holds an object on which a film is to be deposited through vapor deposition; a vapor deposition source that is disposed inside the chamber, the vapor deposition source having a housing that accommodates therein a vapor deposition material for the vapor deposition; and a heater that heats the vapor deposition material. The housing has a plurality of eject outlets and an air outlet that is openable and closable, the plurality of eject outlets connecting the inside of the housing with the outside of the housing and ejecting vapor of the vapor deposition material towards the object.