公开(公告)号：US09196861B2

公开(公告)日：2015-11-24

申请号：US14707501

申请日：2015-05-08

Applicant: JOLED INC.

Inventor： Masaki Aonuma ,  Takuya Satoh ,  Yoichiro Yashiro

IPC: H01L51/52 ,  C23C14/08 ,  H01L51/00 ,  H01L51/56 ,  C23C14/35 ,  H05B33/26

CPC classification number: H01L51/5231 ,  C23C14/086 ,  C23C14/352 ,  H01L51/0021 ,  H01L51/5221 ,  H01L51/5234 ,  H01L51/56 ,  H01L2251/308 ,  H05B33/26

Abstract: An organic EL element is provided having a pair of electrodes and an organic functional layer disposed therebetween, the pair of electrodes consisting of an upper electrode and a lower electrode. In the pair of electrodes, the upper electrode includes a first layer and a second layer, the first layer being in contact with the organic functional layer and the second layer being in contact with the first layer. Additionally, the first layer has a higher membrane stress than the organic functional layer and the second layer. Furthermore, the first layer has a crystalline structure and the second layer has a non-crystalline structure.

Abstract translation: 设置有一对电极和设置在其间的有机功能层的有机EL元件，该一对电极由上电极和下电极组成。 在一对电极中，上电极包括第一层和第二层，第一层与有机功能层接触，第二层与第一层接触。 此外，第一层具有比有机功能层和第二层更高的膜应力。 此外，第一层具有晶体结构，第二层具有非晶结构。

公开(公告)号：US09312488B2

公开(公告)日：2016-04-12

申请号：US14368567

申请日：2013-03-08

Applicant: JOLED INC.

Inventor： Masaki Aonuma ,  Takuya Satoh ,  Akira Takiguchi ,  Yoichiro Yashiro

IPC: H01L51/00 ,  H01L51/52 ,  C23C14/08

CPC classification number: H01L51/0021 ,  C23C14/086 ,  H01L51/5234 ,  H01L2251/308 ,  H01L2251/5315

Abstract: A method of forming an upper electrode in an organic electroluminescent element is provided. A first film made of a material for the upper electrode is formed on an organic functional layer by magnetron sputtering under a first condition. Thereafter, a second film made of the material for the upper electrode is formed on the first film by magnetron sputtering under a second condition different from the first condition. The second film has a lower film stress than the first film.

Abstract translation: 提供了在有机电致发光元件中形成上电极的方法。 在第一条件下通过磁控溅射在有机功能层上形成由上电极材料制成的第一膜。 此后，在与第一条件不同的第二条件下，通过磁控溅射在第一膜上形成由上电极材料制成的第二膜。 第二膜具有比第一膜更低的膜应力。