发明授权
- 专利标题： Attaching device and attaching method
- 专利标题（中）： 连接装置和附件方法
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申请号： US14431902申请日： 2013-09-05
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公开(公告)号： US09337074B2公开(公告)日： 2016-05-10
- 发明人: Yoshihiro Inao , Shigeru Kato , Shugo Tsushima , Junichi Katsuragawa , Satoshi Kobari , Akihiko Nakamura
- 申请人： Tokyo Ohka Kogyo Co., Ltd.
- 申请人地址： JP Kawasaki-Shi
- 专利权人： TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人： TOKYO OHKA KOGYO CO., LTD.
- 当前专利权人地址： JP Kawasaki-Shi
- 代理机构： Knobbe Martens Olson & Bear LLP
- 优先权： JP2012-218720 20120928; JP2013-020895 20130205
- 国际申请： PCT/JP2013/073936 WO 20130905
- 国际公布： WO2014/050484 WO 20140403
- 主分类号： H01L21/68
- IPC分类号： H01L21/68 ; H01L21/683 ; H01L21/67 ; B25J15/00 ; H01L21/687 ; B25J11/00
摘要：
An attaching device configured to attach a substrate and a support via an adhesive layer is provided with support holding members. Holding tools of the support holding members are configured to hold the support with oblique surface parts (contact members) of the holding tools without coming into contact with a surface of the support, which is to be attached to the substrate. The attaching device attaches, to the substrate, the support of which the surface is held not to be contacted.
公开/授权文献
- US20150262858A1 ATTACHING DEVICE AND ATTACHING METHOD 公开/授权日：2015-09-17
信息查询
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