Invention Grant
US09339775B2 Chemical-liquid mixing method and chemical-liquid mixing apparatus
有权
化学 - 液体混合方法和药液混合装置
- Patent Title: Chemical-liquid mixing method and chemical-liquid mixing apparatus
- Patent Title (中): 化学 - 液体混合方法和药液混合装置
-
Application No.: US14750319Application Date: 2015-06-25
-
Publication No.: US09339775B2Publication Date: 2016-05-17
- Inventor: Hiroshi Tanaka , Koukichi Hiroshiro , Fumihiro Kamimura
- Applicant: TOKYO ELECTRON LIMITED
- Applicant Address: JP Tokyo-To
- Assignee: TOKYO ELECTRON LIMITED
- Current Assignee: TOKYO ELECTRON LIMITED
- Current Assignee Address: JP Tokyo-To
- Agency: Smith, Gambrell & Russell, LLP
- Priority: JP2006-211732 20060803
- Main IPC: B01F5/10
- IPC: B01F5/10 ; B01F3/08 ; B01F15/00 ; B01F15/04 ; C01B15/08 ; C11D3/39 ; C11D11/00 ; H01L21/67 ; B01F15/02 ; B01F15/06

Abstract:
The present invention provides a chemical-liquid mixing method and a chemical-liquid mixing apparatus capable of sufficiently generating a peroxornonosulfuric acid that is effective in removing a resist from a substrate, when a sulfuric acid and a hydrogen peroxide solution are mixed with each other. At first, an inner tank 10 is filled up with a sulfuric acid and the sulfuric acid overflowing from the inner tank 10 is allowed to flow into an outer tank 12. Then, a hydrogen peroxide solution is supplied into the inner tank 10 and the hydrogen peroxide solution is allowed to flow into the outer tank 12 whereby the two kinds of liquids of the hydrogen peroxide solution and the sulfuric acid are stored in the outer tank 12. Simultaneously when the hydrogen peroxide solution flows into the outer tank 12, a return pump 16 is activated.
Public/Granted literature
- US20150290599A1 CHEMICAL-LIQUID MIXING METHOD AND CHEMICAL-LIQUID MIXING APPARATUS Public/Granted day:2015-10-15
Information query