Invention Grant
- Patent Title: Pattern layout to prevent split gate flash memory cell failure
- Patent Title (中): 模式布局,防止分裂门闪存单元故障
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Application No.: US14310277Application Date: 2014-06-20
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Publication No.: US09356142B2Publication Date: 2016-05-31
- Inventor: Yu-Hsing Chang , Chang-Ming Wu , Shih-Chang Liu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L29/792
- IPC: H01L29/792 ; H01L29/78 ; H01L29/66

Abstract:
A semiconductor structure of a split gate flash memory cell is provided. The semiconductor structure includes a semiconductor substrate including a first source/drain region and a second source/drain region. The first and second source/drain regions form a channel region therebetween. The semiconductor structure further includes a select gate and a memory gate spaced between the first and second source/drain regions over the channel region. The select gate extends over the channel region and terminates at a line end having a top surface asymmetric about an axis that extends along a length of the select gate and that bisects a width of the select gate. Even more, the semiconductor structure includes a charge trapping dielectric arranged between neighboring sidewalls of the memory gate and the select gate, and arranged under the memory gate. A method of manufacturing the semiconductor structure is also provided.
Public/Granted literature
- US20150372136A1 Pattern Layout to Prevent Split Gate Flash Memory Cell Failure Public/Granted day:2015-12-24
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