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US09362336B2 Sub-lithographic patterning of magnetic tunneling junction devices 有权
磁性隧道结装置的次光刻图案化

Sub-lithographic patterning of magnetic tunneling junction devices
Abstract:
A method for fabricating a magnetic tunnel junction (MTJ) device includes creating a recess within a second patterning layer, in which a first patterning layer overhangs the recessed second patterning layer. Such a method further includes depositing a film into the recess to create a keyhole pattern within the deposited film. The method further includes transferring the keyhole pattern through a hard mask layer to an MTJ stack. The method also includes depositing a conductive material into the transferred keyhole pattern and on an MTJ stack. The method also includes removing the hard mask layer to create a conductive hard mask pillar.
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