Invention Grant
US09368423B2 Semiconductor device and method of using substrate with conductive posts and protective layers to form embedded sensor die package
有权
使用具有导电柱和保护层的基板的半导体器件和方法来形成嵌入式传感器芯片封装
- Patent Title: Semiconductor device and method of using substrate with conductive posts and protective layers to form embedded sensor die package
- Patent Title (中): 使用具有导电柱和保护层的基板的半导体器件和方法来形成嵌入式传感器芯片封装
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Application No.: US13930980Application Date: 2013-06-28
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Publication No.: US09368423B2Publication Date: 2016-06-14
- Inventor: Byung Tai Do , Arnel Trasporto , Linda Pei Ee Chua , Asri Yusof
- Applicant: STATS ChipPAC, Ltd.
- Applicant Address: SG Singapore
- Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee: STATS ChipPAC Pte. Ltd.
- Current Assignee Address: SG Singapore
- Agency: Patent Law Group: Atkins and Associates, P.C.
- Agent Robert D. Atkins
- Main IPC: H01L23/52
- IPC: H01L23/52 ; H01L21/50 ; H01L23/31 ; H01L23/495 ; H01L21/48 ; H01L21/56 ; H01L23/00

Abstract:
A semiconductor device has a substrate including a base and a plurality of conductive posts extending from the base. A semiconductor die is disposed on a surface of the base between the conductive posts. An interconnect structure is formed over the semiconductor die and conductive posts. An adhesive layer is disposed over the semiconductor die. A conductive layer is disposed over the adhesive layer. An encapsulant is deposited over the semiconductor die and around the conductive posts. One or more conductive posts are electrically isolated from the substrate. The conductive layer is a removable or sacrificial cap layer. The substrate includes a wafer-shape, panel, or singulated form. The semiconductor die is disposed below a height of the conductive posts. An interconnect structure is formed over the semiconductor die, encapsulant, and conductive posts.
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