Invention Grant
- Patent Title: Silicon photonics integration method and structure
- Patent Title (中): 硅光子集成方法与结构
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Application No.: US14580564Application Date: 2014-12-23
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Publication No.: US09368653B1Publication Date: 2016-06-14
- Inventor: Solomon Assefa , Tymon Barwicz , William M. Green , Marwan H. Khater , Jessie C. Rosenberg , Steven M. Shank
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Steven Meyers
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L31/0216 ; H01L31/18 ; H01L27/144 ; H01L31/0203

Abstract:
Approaches for silicon photonics integration are provided. A method includes: forming at least one encapsulating layer over and around a photodetector; thermally crystallizing the photodetector material after the forming the at least one encapsulating layer; and after the thermally crystallizing the photodetector material, forming a conformal sealing layer on the at least one encapsulating layer and over at least one device. The conformal sealing layer is configured to seal a crack in the at least one encapsulating layer. The photodetector and the at least one device are on a same substrate. The at least one device includes a complementary metal oxide semiconductor device or a passive photonics device.
Public/Granted literature
- US20160181445A1 SILICON PHOTONICS INTEGRATION METHOD AND STRUCTURE Public/Granted day:2016-06-23
Information query
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