Invention Grant
US09373484B2 Plasma generator, manufacturing method of rotating electrode for plasma generator, method for performing plasma treatment of substrate, and method for forming thin film having mixed structure by using plasma
有权
等离子体发生器,用于等离子体发生器的旋转电极的制造方法,用于执行基板的等离子体处理的方法,以及通过使用等离子体形成具有混合结构的薄膜的方法
- Patent Title: Plasma generator, manufacturing method of rotating electrode for plasma generator, method for performing plasma treatment of substrate, and method for forming thin film having mixed structure by using plasma
- Patent Title (中): 等离子体发生器,用于等离子体发生器的旋转电极的制造方法,用于执行基板的等离子体处理的方法,以及通过使用等离子体形成具有混合结构的薄膜的方法
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Application No.: US14241223Application Date: 2012-08-10
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Publication No.: US09373484B2Publication Date: 2016-06-21
- Inventor: Kee-Seok Nam , Jung-Dae Kwon , Yong Soo Jeong , Gun Hwan Lee , Jung Heum Yoon , Sung Hun Lee , Dong Ho Kim , Jae Wook Kang , Sung Gyu Park , Chang Su Kim
- Applicant: Kee-Seok Nam , Jung-Dae Kwon , Yong Soo Jeong , Gun Hwan Lee , Jung Heum Yoon , Sung Hun Lee , Dong Ho Kim , Jae Wook Kang , Sung Gyu Park , Chang Su Kim
- Applicant Address: KR Daejeon
- Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Current Assignee: KOREA INSTITUTE OF MACHINERY & MATERIALS
- Current Assignee Address: KR Daejeon
- Agency: Ladas & Parry LLP
- Priority: KR10-2011-0079921 20110811; KR10-2012-0037089 20120410; KR10-2012-0077974 20120717
- International Application: PCT/KR2012/006384 WO 20120810
- International Announcement: WO2013/022306 WO 20130214
- Main IPC: H01J37/32
- IPC: H01J37/32 ; C23C16/509 ; H05H1/24 ; H01J9/02 ; C23C16/503 ; H05H1/48

Abstract:
A plasma generator according to an embodiment of the present invention is provided to generate a high density and stable plasma at near atmospheric pressure by preventing a transition of plasma to arc. The plasma generator includes a plate-shaped lower electrode for seating a substrate; and a cylindrical rotating electrode on the plate-shaped lower electrode, wherein the cylindrical rotating electrode includes an electrically conductive body that is connected to a power supply and includes a plurality of capillary units on an outer circumferential surface of the electrically conductive body; and an insulation shield layer that is made of an insulation material or a dielectric material, exposes a lower surface of the plurality of capillary units, and shields other parts.
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