Invention Grant
US09376581B2 Photo-curable composition for imprints, pattern forming method and pattern
有权
用于印记的光固化组合物,图案形成方法和图案
- Patent Title: Photo-curable composition for imprints, pattern forming method and pattern
- Patent Title (中): 用于印记的光固化组合物,图案形成方法和图案
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Application No.: US14483860Application Date: 2014-09-11
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Publication No.: US09376581B2Publication Date: 2016-06-28
- Inventor: Hirotaka Kitagawa , Masafumi Yoshida
- Applicant: FUJIFILM Corporation
- Applicant Address: JP Tokyo
- Assignee: FUJIFILM Corporation
- Current Assignee: FUJIFILM Corporation
- Current Assignee Address: JP Tokyo
- Agency: Sughrue Mion, PLLC
- Priority: JP2012-056158 20120313
- Main IPC: C08F2/46
- IPC: C08F2/46 ; C08F2/50 ; C08G61/04 ; C09D11/101 ; C08F220/18 ; C08F236/20 ; C08F2/48 ; G03F7/00 ; G03F7/004 ; G03F7/027 ; B05D5/00 ; B29C59/00 ; B29C59/16 ; H01L21/027 ; H01L21/308 ; B29K33/00 ; C08F220/58 ; C08F220/32 ; H01L21/311

Abstract:
To provide a photo-curable composition for imprints which can ensure high ratio of mold filling and low defect density during mold releasing, and can provide a resist material with high etching durability. A photo-curable composition for imprints comprising a monofunctional monomer, a polyfunctional monomer and a photo-polymerization initiator, having a viscosity at 25° C. of 15 mPa·s or smaller, an Ohnishi parameter of 3.0 or smaller, and a crosslink density calculated by (Formula 1) of 0.6 mmol/cm3 or larger; Crosslink density={Σ(Ratio of mixing of polyfunctional monomer (parts by mass)*Number of functional groups of polyfunctional monomer/Molecular weight of polyfunctional monomer)}/Specific gravity.
Public/Granted literature
- US20140374884A1 PHOTO-CURABLE COMPOSITION FOR IMPRINTS, PATTERN FORMING METHOD AND PATTERN Public/Granted day:2014-12-25
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