Invention Grant
- Patent Title: Fin-shaped field-effect transistor process
- Patent Title (中): 鳍状场效应晶体管工艺
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Application No.: US14847015Application Date: 2015-09-08
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Publication No.: US09379026B2Publication Date: 2016-06-28
- Inventor: Chien-Ting Lin , Wen-Tai Chiang
- Applicant: UNITED MICROELECTRONICS CORP.
- Applicant Address: TW Science-Based Industrial Park, Hsin-Chu
- Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee: UNITED MICROELECTRONICS CORP.
- Current Assignee Address: TW Science-Based Industrial Park, Hsin-Chu
- Agent Winston Hsu; Scott Margo
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/336 ; H01L21/8238 ; H01L21/8234 ; H01L21/28 ; H01L29/51 ; H01L29/66

Abstract:
A fin-shaped field-effect transistor process includes the following steps. A substrate is provided. A first fin-shaped field-effect transistor and a second fin-shaped field-effect transistor are formed on the substrate, wherein the first fin-shaped field-effect transistor includes a first metal layer and the second fin-shaped field-effect transistor includes a second metal layer. A treatment process is performed on the first fin-shaped field-effect transistor to adjust the threshold voltage of the first fin-shaped field-effect transistor. A fin-shaped field-effect transistor formed by said process is also provided.
Public/Granted literature
- US20150380319A1 FIN-SHAPED FIELD-EFFECT TRANSISTOR PROCESS Public/Granted day:2015-12-31
Information query
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