Invention Grant
- Patent Title: Method and apparatus for depositing LED organic film
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Application No.: US13095619Application Date: 2011-04-27
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Publication No.: US09385322B2Publication Date: 2016-07-05
- Inventor: Vladimir Bulovic , Marc A. Baldo , Martin A. Schmidt , Valerie Gassend , Jianglong Chen
- Applicant: Vladimir Bulovic , Marc A. Baldo , Martin A. Schmidt , Valerie Gassend , Jianglong Chen
- Applicant Address: US CA Cambridge
- Assignee: Massachusetts Institute of Technology
- Current Assignee: Massachusetts Institute of Technology
- Current Assignee Address: US CA Cambridge
- Main IPC: C23C16/00
- IPC: C23C16/00 ; H01L51/00 ; C23C16/448 ; C23C16/455 ; C23C16/04 ; B05D1/12 ; H01L51/56
Abstract:
In one embodiment the disclosure relates to an apparatus for depositing an organic material on a substrate, including a source heater for heating organic particles to form suspended organic particles; a transport stream for delivering the suspended organic particles to a discharge nozzle, the discharge nozzle having a plurality of micro-pores, the micro-pores providing a conduit for passage of the suspended organic particles; and a nozzle heater for pulsatingly heating the micro-pores nozzle to discharge the suspended organic particles from the discharge nozzle.
Public/Granted literature
- US20110262624A1 Method and Apparatus for Depositing LED Organic Film Public/Granted day:2011-10-27
Information query
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