Invention Grant
- Patent Title: Plasma resistant ceramic coated conductive article
- Patent Title (中): 等离子陶瓷涂层导电制品
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Application No.: US13687512Application Date: 2012-11-28
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Publication No.: US09394615B2Publication Date: 2016-07-19
- Inventor: Jennifer Y. Sun , Biraja P. Kanungo , Ren-Guan Duan , Hamid Noorbakhsh , Junhan Yuh , Dmitry Lubomirsky
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Lowenstein Sandler LLP
- Main IPC: C23F1/08
- IPC: C23F1/08 ; B05D3/00 ; B23K10/00 ; H05K1/05 ; H01J37/32 ; C04B41/87 ; C04B5/00 ; C04B7/32 ; C04B18/02 ; C04B28/06 ; C04B35/44 ; C22C32/00 ; C22C29/12 ; B32B18/00 ; C04B41/50 ; C04B41/00
Abstract:
To manufacture a ceramic coated article, at least one surface of a conductive article is roughened to a roughness of approximately 100 micro-inches (μin) to approximately 300 μin. The conductive article may then be heated and coated with a ceramic coating comprising a yttrium containing oxide to a thickness of approximately 10-40 mil.
Public/Granted literature
- US20130284373A1 PLASMA RESISTANT CERAMIC COATED CONDUCTIVE ARTICLE Public/Granted day:2013-10-31
Information query
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