Invention Grant
- Patent Title: Methods of forming multi-Vt III-V TFET devices
- Patent Title (中): 形成多Vt III-V TFET器件的方法
-
Application No.: US14992209Application Date: 2016-01-11
-
Publication No.: US09397199B1Publication Date: 2016-07-19
- Inventor: Unoh Kwon , Siddarth A. Krishnan , Vijay Narayanan , Jeffrey Sleight
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: Globalfoundries, Inc.
- Current Assignee: Globalfoundries, Inc.
- Current Assignee Address: KY Grand Cayman
- Agency: Hoffman Warnick LLC
- Agent David Cain
- Main IPC: H01L21/76
- IPC: H01L21/76 ; H01L29/66 ; H01L21/762 ; H01L21/268 ; H01L29/51 ; H01L21/02 ; H01L21/306 ; H01L21/28

Abstract:
The disclosure generally relates to a method for forming multiple III-V Tunnel Field-Effect Transistors (III-V TFETs) microchips in which each TFET has a different threshold voltage (Vt) or work-function. In one embodiment of the disclosure, four TFETs are formed on a substrate. Each TFET has a source, drain and a gate electrode. Each gate electrode is then processed independently to provide a substantially different threshold voltage. Each TFET will have an intrinsic channel.
Information query
IPC分类: