Invention Grant
- Patent Title: Magnetic memory cells and methods of formation
- Patent Title (中): 磁记忆细胞和形成方法
-
Application No.: US14582826Application Date: 2014-12-24
-
Publication No.: US09406874B2Publication Date: 2016-08-02
- Inventor: Witold Kula , Gurtej S. Sandhu , Stephen J. Kramer
- Applicant: Micron Technology, Inc.
- Applicant Address: US ID Boise
- Assignee: Micron Technology, Inc.
- Current Assignee: Micron Technology, Inc.
- Current Assignee Address: US ID Boise
- Agency: TraskBritt
- Main IPC: H01L43/12
- IPC: H01L43/12 ; H01L43/02 ; H01L27/22 ; H01L43/08

Abstract:
Methods of forming magnetic memory cells are disclosed. Magnetic and non-magnetic materials are formed into a primal precursor structure in an initial stress state of essentially no strain, compressive strain, or tensile strain. A stress-compensating material, e.g., a non-sacrificial, conductive material, is formed to be disposed on the primal precursor structure to form a stress-compensated precursor structure in a net beneficial stress state. Thereafter, the stress-compensated precursor structure may be patterned to form a cell core of a memory cell. The net beneficial stress state of the stress-compensated precursor structure lends to formation of one or more magnetic regions, in the cell core, exhibiting a vertical magnetic orientation without deteriorating a magnetic strength of the one or more magnetic regions. Also disclosed are memory cells, memory cell structures, semiconductor device structures, and spin torque transfer magnetic random access memory (STT-MRAM) systems.
Public/Granted literature
- US20150137291A1 MAGNETIC MEMORY CELLS AND METHODS OF FORMATION Public/Granted day:2015-05-21
Information query
IPC分类: