Invention Grant
- Patent Title: Integrated photodetector waveguide structure with alignment tolerance
-
Application No.: US14833639Application Date: 2015-08-24
-
Publication No.: US09423582B2Publication Date: 2016-08-23
- Inventor: Solomon Assefa , Bruce W. Porth , Steven M. Shank
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Roberts Mlotkowski Safran & Cole, P.C.
- Agent Steven J. Meyers; Andrew M. Calderon
- Main IPC: H01L31/00
- IPC: H01L31/00 ; G02B6/42 ; H01L31/0232 ; H01L31/18 ; H01L31/028 ; G02B6/122 ; G02B6/136 ; H01L31/0203
Abstract:
An encapsulated integrated photodetector waveguide structures with alignment tolerance and methods of manufacture are disclosed. The method includes forming a waveguide structure bounded by one or more shallow trench isolation (STI) structure(s). The method further includes forming a photodetector fully landed on the waveguide structure.
Public/Granted literature
- US20150364620A1 INTEGRATED PHOTODETECTOR WAVEGUIDE STRUCTURE WITH ALIGNMENT TOLERANCE Public/Granted day:2015-12-17
Information query
IPC分类:
