Invention Grant
US09425099B2 Epitaxial channel with a counter-halo implant to improve analog gain
有权
具有反向晕轮植入的外延通道,以改善模拟增益
- Patent Title: Epitaxial channel with a counter-halo implant to improve analog gain
- Patent Title (中): 具有反向晕轮植入的外延通道,以改善模拟增益
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Application No.: US14156496Application Date: 2014-01-16
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Publication No.: US09425099B2Publication Date: 2016-08-23
- Inventor: Tsung-Hsing Yu , Shih-Syuan Huang , Ken-Ichi Goto , Yi-Ming Sheu
- Applicant: Taiwan Semiconductor Manufacturing Co., Ltd.
- Applicant Address: TW Hsin-Chu
- Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee: Taiwan Semiconductor Manufacturing Co., Ltd.
- Current Assignee Address: TW Hsin-Chu
- Agency: Eschweiler & Associates, LLC
- Main IPC: H01L21/8234
- IPC: H01L21/8234 ; H01L27/088 ; H01L29/165 ; H01L29/78 ; H01L29/66 ; H01L29/10 ; H01L21/265

Abstract:
Some embodiments of the present disclosure relate to an implant that improves long-channel transistor performance with little to no impact on short-channel transistor performance. To mitigate DIBL, both long-channel and short-channel transistors on a substrate are subjected to a halo implant. While the halo implant improves short-channel transistor performance, it degrades long-channel transistor performance. Therefore, a counter-halo implant is performed on the long-channel transistors only to restore their performance. To achieve this, the counter-halo implant is performed at an angle that introduces dopant impurities near the source/drain regions of the long-channel transistors to counteract the effects of the halo implant, while the counter-halo implant is simultaneously shadowed from reaching the channel of the short-channel transistors.
Public/Granted literature
- US20150200139A1 EPITAXIAL CHANNEL WITH A COUNTER-HALO IMPLANT TO IMPROVE ANALOG GAIN Public/Granted day:2015-07-16
Information query
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